Electroceramic-based MEMS: fabrication-technology and...

Main
Engineering
Electroceramic-based MEMS:...

Electroceramic-based MEMS: fabrication-technology and applications

Name: Electroceramic-based MEMS: fabrication-technology and applications
ISBN: 9780387233109

Nava Setter

0 / 0

0 comments

دا کتاب تاسو ته څنګه خواښه شوه؟

د بار شوي فایل کیفیت څه دئ؟

تر څو چې د کتاب کیفیت آزمایښو وکړئ، بار ئې کړئ

د بار شوو فایلونو کیفیتی څه دئ؟

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

درجه (قاطیغوری(:

Engineering

کال:

2005

خپرونه:

خپرندویه اداره:

Springer

ژبه:

english

صفحه:

415

ISBN 10: